This seminar, the seventh in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces. The implementation is supported by the Helmholtz-Fonds e.V.
- EUV Lithography
- EUV Nano Metrology
- Surfaces and Spectroscopy
- Optical Material Properties
- Space Instruments
- EUV and XUV Laboratory Sources and Instruments
13 November 2023 late afternoon: lab visit +)
+) Metrology Light Source, Berlin-Adlershof
14 - 15 November 2023 full day: oral and poster sessions
on-site in-person conference at PTB's historical site in Berlin Charlottenburg
14 November 2023 evening: Get-together-Dinner
The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.
Confirmed invited speakers
Mark van de Kerkhof, ASML Hartmut Enkisch, Zeiss SMT Christina Porter, ASML
Maciej Bzowski, PAN CBK Niklas Papathanasiou, SGLUX N.N., optiXfab
Conference Chairs: Michael Kolbe, Alexander Gottwald
Conference Office: Vivien Tritschler, Stefanie Handreck
Abbestr. 2-12, 10587 Berlin,
We are looking forward to seeing you in Berlin!