Optical Analytics, Congress, Conference

322nd PTB-Seminar VUV and EUV Metrology

08:00 till 17:00
Abbestr. 2-12, 10587 Berlin
Physikalisch-Technische Bundesanstalt
On November 14-15, 2023, the 322nd PTB Seminar "VUV and EUV Metrology" will take place at the Hermann von Helmholtz Building of the Physikalisch-Technische Bundesanstalt (PTB) in Berlin.

This seminar, the seventh in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces. The implementation is supported by the Helmholtz-Fonds e.V.

Topics covered:


  •  EUV Lithography
  • EUV Nano Metrology
  • Surfaces and Spectroscopy
  • Optical Material Properties
  • Space Instruments
  • Detectors
  • EUV and XUV Laboratory Sources and Instruments




13 November 2023 late afternoon: lab visit +)
+) Metrology Light Source, Berlin-Adlershof

14 - 15 November 2023 full day: oral and poster sessions
on-site in-person conference at PTB's historical site in Berlin Charlottenburg

14 November 2023 evening: Get-together-Dinner 

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The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

Confirmed invited speakers

Mark van de Kerkhof, ASML          Hartmut Enkisch, Zeiss SMT         Christina Porter, ASML

Maciej Bzowski, PAN CBK          Niklas Papathanasiou, SGLUX          N.N., optiXfab





Conference Chairs: Michael Kolbe, Alexander Gottwald
Conference Office: Vivien Tritschler, Stefanie Handreck

Physikalisch-Technische Bundesanstalt
Abbestr. 2-12, 10587 Berlin,

e-mail: EUV2023@ptb.de

We are looking forward to seeing you in Berlin!