Optical Analytics, Congress, Conference

322nd PTB-Seminar VUV and EUV Metrology

08:00 till 17:00
Abbestr. 2-12, 10587 Berlin
Physikalisch-Technische Bundesanstalt
On November 14-15, 2023, the 322nd PTB Seminar "VUV and EUV Metrology" will take place at the Hermann von Helmholtz Building of the Physikalisch-Technische Bundesanstalt (PTB) in Berlin.

This seminar, the seventh in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces. The implementation is supported by the Helmholtz-Fonds e.V.

Topics covered:


  •  EUV Lithography
  • EUV Nano Metrology
  • Surfaces and Spectroscopy
  • Optical Material Properties
  • Space Instruments
  • Detectors
  • EUV and XUV Laboratory Sources and Instruments

The first announcement, with a call for papers and further details, will follow in March 2023. We hope the situation in Autumn 2023 will allow us to welcome you personally to Berlin. Nevertheless, we will also provide virtual access to the oral sessions. On our seminar website at www.euv2023.ptb.de, you will find continuously updated information about our event.


Conference Chairs: Michael Kolbe, Alexander Gottwald
Conference Office: Vivien Tritschler, Stefanie Handreck

Physikalisch-Technische Bundesanstalt
Abbestr. 2-12, 10587 Berlin,

e-mail: EUV2023@ptb.de

We are looking forward to seeing you in Berlin!